Clean Room Humidity Range

Clean rooms need a lot of air and usually at a controlled temperature and humidity.

Clean room humidity range.

Humidity in clean rooms clean rooms in general. The reason why their comfort matters is even more interesting. The air inside is constantly recir culated through high effici ency par ticulate air hepa efilters. This means that in most facilities the cleanrooms air handling units ahu consume over 60 of all the site power.

Some clean rooms ar e entire. Humidity in clean rooms clean rooms in general a clean room is a manufactur ing environment that has a low level of environmental poll utants such as dust airborn e microbes aerosol particles cand chemical vapors. If you were to set your temperature at 70 degrees and 50 relative humidity at 68 degrees that would be 55 relative humidity. That translates again into the cost of construction and the cost of operating your clean room.

Relative humidity in a semiconductor cleanroom is typically controlled to a target value somewhere within the 30 to 50 percent range and with tolerances as narrow as 1 percent for some areas such as photolithography or even less for deep ultraviolet processing duv and relaxing to. Relative humidity is one of the environmental conditions usually specified for cleanroom operations. A clean room is a manufacturing environment that has a low level of environmental pollutants such as dust airborne microbes aerosol particles and chemical vapors. Like humidity levels it s important to maintain a standard temperature in cleanrooms to keep employees comfortable.